Tungsten alloy is generally used in aerospace, military defense services, the nuclear industry, and other essential fields of manufacturing due to its physical and chemical properties. As the demand for tungsten alloy increases, it demands higher requirements for the accuracy, quality, and surface integrity of tungsten alloy products. So, it is of paramount importance to study the manufacturing, processing, and testing of tungsten alloys through the power generating during machining, the surface, and subsurface of finished products. Grinding is an abrasive machining method that can achieve extremely fine surface finishes while retaining high dimensional and shape precision. However, the process causes subsurface damage, which affects the mechanical properties and surface quality of the machined workpiece. In this paper, the grinding simulations in Abaqus software and experiments on CNC machine on both Rotary Ultrasonic Grinding (RUG) and Conventional Grinding (CG) were carried out by Taguchi experimental design method to study the different influences of spindle speed, grinding depth, feed rate, ultrasonic frequency and amplitude on subsurface damage induced in grinding of tungsten alloy. Briefly, simulation and experiment results showed well agreement at the same time present the reduction of subsurface damage depth on ultrasonic grinding compared to conventional grinding. Also, the increase of grinding depth and feed rate and amplitude generates a high Subsurface Damage depth (SSD depth) where the increasing of spindle speed decreases the SSD depth, but ultrasonic frequency present a little effect on it.